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| | ( ) | | Head: | Dietrich R. T. Zahn | | members: | ↗ | | Topics: | |
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| | M-2000/T-Solar | J.A. Woollam Co., Inc., | 0.7 - 5 eV | RCE, Mueller Matrix, Jones Matrix, Depolarisation, Reflection, Transmission | CCD, variable angles, focusing, automatic mapping stage, in situ adapters | | | VASE | J.A. Woollam Co., Inc., | 0.7 - 5 eV | RAE with AutoRetarder, Mueller Matrix, Jones Matrix, Depolarisation, Reflection, Transmission | scanning monochromator, variable angles, adapters for in situ measurements | | | UVISEL | HORIBA Jobin Yvon | 1.5 - 6 eV | reflection, in situ | PEM, PMT, spectroscopic or ultra-fast multi-channel, in situ on a inert gas glove box | | | RAS | Home made | 1.5 - 5.5 eV | reflection | PEM, PMT, spectroscopic, in situ and ex situ | | | MOKE | home built | 1.5 - 5.5 eV | reflection, polar geometry | PEM, PMT, spectroscopic | | | | | top | | | | ( ) | | Head: | dong | | members: | ↗ | | Topics: | |
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| | | | | wi | | | | | | top | | | | SOITEC ( Bernin) | | Head: | R&D Scientist Riou (E-Mail: gregory.riou 'at' soitec.fr) | | members: | ↗ | | Topics: | optical properties |
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| | GES5E for R&D | SopraLab | 190-1700 nm | Variable angle spectroscopic ellipsometry | | | | | | top | | | | |
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| | Alpha-SE | J.A. Woollam Co. | 380 - 900nm | RCE, N,C,S, Mueller Matrix, Jones Matrix, Depolarisation, Reflection, Transmission | CCD, 3 angles of incidence | | | M-2000/T-Solar | J.A. Woollam Co. | 245 - 1000nm | RCE, N,C,S, Mueller Matrix, Jones Matrix, Depolarisation, Reflection, Transmission | CCD, focusing, variable angles, QCM-D | | | VASE | J.A. Woollam Co. | 250 - 2400nm | RAE with AutoRetarder, Mueller Matrix, Jones Matrix, Depolarisation, Reflection, Transmission | variable angles, vertical sample mount, scatterometry, scanning monochromator | | | | | top | | | | Institute of Semiconductor Physics of NASU ( Kiev) | | Head: | Dr. Eugene Bortchagovsky (E-Mail: bortch 'at' yahoo.com) | | members: | ↗ | | Topics: | ellipsometry, thin films, surface plasmons, nanoparticles and nanostructures, plasmonics, near-field optics, TERS |
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| | SmartSE | HORIBA Jobin Yvon | 440-1000 nm | spectroscopic, kinetic, Mueller matrix | | | | UVISEL-ER | HORIBA Jobin Yvon | 190-2100 nm | spectroscopic, kinetic | | | | AutoSE | HORIBA Jobin Yvon | 440-1000 nm | spectroscopic, Mueller matrix | | | | | | top | | | | Center for Physical Science and Technology ( VILNIUS) | | Head: | Zigmas Balevicius (E-Mail: zbalevicius 'at' ar.fi.lt) | | members: | ↗ | | Topics: | Spectroscopic ellipsometry, total internal reflection ellipsometry, plasmonics, anisotropy, Mueller matrix |
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| | GES5 for R&D | Sopra | 250-2000nm | rotating polariser, compensator, scanning monochromator, PMT, focusing | variable angle,in situ, TIRE cell for liquids | | | M2000X | J.A. Woollam | 210-1000nm | RCE, CCD, Mueller matrix, Generalized ellipsometry, focusing | Variable angle, in situ, Total internal reflection mode | | | | | top | | | | |
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| | VASE | J.A. Woollam | 250 nm- 1700 nm | | | | | | | | wiSpectroscopic, RAE with AutoRetarder, Jones Matrix, Depolarisation, Reflection, Transmission | | | | | | | wi | vertical sample mount | | | | | | | | | | | | top | | | | ALD-group of Dr. Matthias Albert (Institute of Semiconductors and Microsystems , Dresden) | | Head: | Marcel Junige (E-Mail: marcel.junige 'at' mailbox.tu-dresden.de) | | members: | ↗ | | Topics: | in situ, real-time, spectroscopic ellipsometry, atomic layer deposition |
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| | M 2000 FI | J. A. Woollam Co., Inc | for in-situ-usage from 200 nm to 1700 nm | rotating compensator ellipsometer with two charge-coupled device line detectors, mounted under a 65° angle of incidence | | | | | | top | | | | Ellipsometry Workgroup IPF ( Leibniz – Institut für Polymerforschung e. V., Dresden) | | Head: | Dr. K. J. Eichhorn (E-Mail: kjeich 'at' ipfdd.de) | | members: | ↗ | | Topics: | thin polymer layers: coatings, polymer brushes, hydrogels, polyelectrolyte multilayers, protein adsorption, polymer-nanoparticle systems; in situ studies: ph- and temperature dependent switching in aqueous media, glas transition temperatures in thin polymer films; thin organic layers: optical constants, anisotropy |
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| | M-2000UI | J.A. Woollam Co. | 245-1690 nm | RCE, Depolarisation, Reflection, Transmission | variable angles of incidence, focusing, in-situ pH- and temperature measurement, SPR | | | Alpha-SE | J.A. Woollam Co. | 380 - 900 nm | RCE, Depolarisation, Reflection, Transmission | 3 angles of incidence, in-situ pH- and temperature measurement | | | EP3 | Accurion GmbH | 633 nm | PCSA, Auto-nulling Imaging Ellipsometer | variable angles of incidence, in-situ, temperature measurement | | | | | top | | | | Ellipsometry Workgroup Leipzig (Uni Leipzig / IOM Leipzig, Leipzig) | | Head: | Dr. Rüdiger Schmidt-Grund (E-Mail: Schmidt-Grund 'at' physik.uni-leipzig.de) | | members: | ↗ | | Topics: | dielectric function, electronic bandstructure, wide gap oxides, microresonators, excitons, exciton-polaritons, magneto-optical coupling, electro-optical coupling, correlated systems, structured surfaces, plasmonic structures, nanostructure arrays, semiconductors, preowskites, ferroelectrics, multiferroics, ZnO, MgZnO, BaTiO3, StTiO3 |
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| | M2000 | J.A. Woollam Co., Inc. | 0.75 - 3.38 eV | RCE, Mueller Matrix, Jones Matrix, Depolarisation, Reflection, Transmission | CCD, in-situ, focussing (spot size 200mum), multi-angle option (13° - 90°), 588 wavelength, time resolution 0.1 - 10s, rotating compensator | | | VASE | J.A. Woollam Co., Inc. | 0.75 - 5 eV | RAE with AutoRetarder, Mueller Matrix, Jones Matrix, Depolarisation, Reflection, Transmission Scatterometry | focussing (Spot size 200mum), UHV kryostat (10 - 470 K, 5*10^-11 mbar), rotating sample stage, variable angle, vertical sample mount, scanning monochromator | | | IRSE | J.A. Woollam Co., Inc. | 300 - 5000 rcm | RAE with AutoRetarder, Mueller Matrix, Jones Matrix, Depolarisation, Reflection, Transmission | FTIR based, variable angle, vertical sample mount | | | VUV-VASE | J.A. Woollam Co., Inc. | 0.5 - 9 eV | RAE with AutoRetarder, Mueller Matrix, Jones Matrix, Depolarisation, Reflection, Transmission Scatterometry | 300mm R-Theta scanning sample stage, variable angle, vertical sample mount, scanning monochromator, cryostat (4.2 - 500 K), atmospheric cell | | | | | top | | | | Ellipsometry, Transparent Conductive Oxides (Division of Ion Technology, Institute of Ion-Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresen) | | Head: | Dr. Mykola Vinnichenko (E-Mail: m.vinnichenko 'at' hzdr.de 'at' ) | | members: | ↗ | | Topics: | in situ spectroscopic ellipsometry, interfaces between transparent conductive oxides (TCO) and photovoltaic active layers, TCO properties evolution during growth or post-deposition treatment, growth mechanisms of oxide thin films, characterization of high-refractive index materials |
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| | M-2000V | J. A. Woollam Inc., USA | 1.24 - 3.3 eV | Rotating Compensator Ellipsometer (RCE), in situ ellipsometry, Jones Matrix, anisotropy, depolarization, Mueller Matrix | CCD, QTH lamp, time resolution 0.1-10 s, fixed angle of light incidence, installation: ex situ stage, magnetron sputter deposition chambers or annealing chamber | | | M-2000FI | J. A. Woollam Inc., USA | 0.75-5.9 eV | Rotating Compensator Ellipsometer (RCE), in situ ellipsometry, Jones Matrix, anisotropy, depolarization, Mueller Matrix | CCD, Xe-lamp, time resolution 0.1-10 s, fixed angle of light incidence, installation: ex situ stage, magnetron sputter deposition chambers or annealing chamber | | | VASE | J. A. Woollam Inc., USA | 0.75-5.0 eV | Rotating Analyzer Ellipsometer (RAE) with AutoRetarder, Jones Matrix, depolarization, anisotropy | variable angle of light incidence, measurements in transmission or reflection mode | | | | | top | | | | IR group ISAS (Leibniz – Institut für Analytische Wissenschaften - ISAS - e.V., Berlin and Dortmund) | | Head: | Dr. Karsten Hinrichs (E-Mail: hinrichs 'at' physik.tu-berlin.de) | | members: | ↗ | | Topics: | Infrared Ellipsometry, method developement for in-situ vibrational spectroscopy, synchrotron ellipsometry, solid-liquid interfaces, functional polymer films, organic films for solar cells and biosensors, metamaterials, self-assembling monolayers, porphyrins |
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| | ISAS – MIR - Labellipsometer | - | 400-4000 wavenumbers | Multiple angle, Röseler principle,
Transmission, Reflection, ATR | IR - Ellipsometer externally attached at Bruker Vertex 70 or IFS 55 | | | IR synchrotron mapping Ellipsometer | - | 800 - 3000 wavenumbers | Multiple angle, Rotating Compensator,
variation of focus diameter between 0.2 to 1 mm. | Externally attached to Bruker IFs 66v, using synchrotron light source (BESSY II of the HZB-Berlin), equipped with mapping table
(Sentech Instruments).
Limited access via BESSY
beam time proposals
and prior approval
by the station manager (Karsten Hinrichs,
Ulrich Schade).
Developed by Arnulf Röseler, Karsten Hinrichs and Michael Gensch.
| | | ISAS – NIR - Labellipsometer | - | 800-10000 wavenumbers | Multiple angle, Röseler principle,
Transmission, Reflection | IR - Ellipsometer externally attached at Bruker Tensor | | | Combined IRSE - RAS | ISAS, Laytec GmbH Berlin | UV- MIR | Combined Laytec RAS, IR ellipsometry for electrochemical studies at solid-liquid interfaces. | Common set-up of ISAS, Laytec GmbH Berlin
and HZB Berlin.
| | | | | top | | | | Laboratory of Multifunctional Materials and Structures ( National Institute of Materials Physics, Magurele) | | Head: | dr. Aurelian-Catalin Galca (E-Mail: ac_galca 'at' infim.ro) | | members: | ↗ | | Topics: | spectroscopic ellipsometry; xrd; luminescence spectroscopy; transparent conductive and flexible thin films; transparent conductive oxides, semiconducting chalcogenides; ferrofluids; solar cells, thin films, nanowires, quantum dots, semiconductor devices, chalcogenides, light emitting diodes, mocvd |
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| | V-VASE | Woollam | 193 up to 2200nm, 6.4 down to 0.56eV | ex-situ, sample translation, liquid-cell, Instec heat stage -160C up to 600C | | | | | | top | | | | |
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| | VASE Ellipsometer | J.A. Woollam Co. | 250-2400 nm | RAE with AutoRetarder, Mueller Matrix, Jones Matrix, Depolarisation, Reflection, Transmission | variable angles and wavelengths, vertical sample mount, XY translator, scatterometry, microfluidic system | | | | | top | | | | LPMD ( University Paul Verlaine-Metz, Metz) | | Head: | Dr En Naciri (E-Mail: ennacir 'at' univ-metz.fr) | | members: | ↗ | | Topics: | ellipsometry ; Nanocrystals ; Dielectric function ; Anisotropy |
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| | Rotating Polarizer ellipsometer and Rotating Compensator ellipsometer | made in LPMD laboratory | 250 to 900 nm | wi | | | | | | top | | | | Polarimetry Instrumentation and Raman Spectroscopy Group (Ecole Polytechnique, Palaiseau) | | Head: | PhD Enric Garcia-Caurel (E-Mail: enric.garcia-caurel 'at' polytechnique.edu) | | members: | ↗ | | Topics: | ultraviolet, visible, infrared, ellipsometry, polarimetry, Mueller, thin-film, plasmons, semiconductor, solar |
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| | NIR - MIR Mueller Polarimeter / Ellipsometer | Homemade Prototype - LPICM | 2,500 - 14,000 nm - 0.6 - 0.09 eV | Relection mode, Angle of Incidence 50,60,70 and 80° | Uses
1)Characterization of metals and doped semiconductors. Optical/Electrical properties.
2) Characterization of organic thin films
3) Characterization of bio-films | | | MM16 - Spectroscopic Mueller Polarimeter/Ellipsometer | HORIBA | 450 - 850 nm / 1.4 6 - 2.75 eV | Reflexion and Transmission, Multiple angle of incidence | Uses:
1) Optical metrology - Profile reconstruction of 1D and 2D diffraction gratings.
2) Anisotropy measurements - Determination of the birefringence of thin films and bulk materials
3) Multiple angle of incidence ellipsometry. | | | UVISEL - Spectroscopic Ellipsometer | Horiba | 275-1750 nm / 4.5-07 eV | Reflection Ellipsometry, angle of incidence = 70° | Routine Thin Film Characterization.
Metals (Au, Ag, Al, Cr)
Semiconductors(a-Si, c-Si, c-Ge, ZnO:Al)
Dielectrics (SiO2, SiN, SiON) | | | | | top | | | | Prof. Dressel ( 1.Physikalisches Institut, Uni-Stuttgart, Stuttgart) | | Head: | Dr. Bruno Gompf (E-Mail: gompf 'at' pi1.physik.uni-stuttgart.de) | | members: | ↗ | | Topics: | Ultrathin metal films, metamaterials, organic semiconductors, correlated electron systems |
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| | VASE | J.A. Woollam Co. | 230 - 2300 nm | RAE with AutoRetarder, Mueller Matrix, Jones Matrix, Depolarisation, Reflection, Transmission | variable angles of incidence, variable azimuth orientation, variable temperature 5 - 350K, Mikrospot (200µm) | | | | | top | | | | Solar Thermal Materials ( Institute for Solar Energy Research Hamelin GmbH, Hamelin, Germany) | | Head: | Dr. Reineke-Koch (E-Mail: r.reineke-koch 'at' isfh.de) | | members: | ↗ | | Topics: | solar thermal collectors, selective absorber layers, low-e coating, transparent conductive oxides, accelerated ageing tests, thin film photovoltaics |
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| | Spectral Ellipsometer M-2000 UI | J.A. Woollam Inc., USA | 240 - 1700 nm | Variable angle spectal ellipsometry, RCE, compensator, depolarisation, transmittance | heating and cooling equipment (system W1-25 from INSTEC) for a temperature range from -80°C to 600°C | | | Spectral Ellipsometer IR-VASE | J.A. Woollam Inc., USA | 1700 - 33000 nm | Variable angle spectral ellipsometry, RCE, compensator, depolarisation, transmittance | heating and cooling equipment (system W1-25 from INSTEC) for a temperature range from -80°C to 600°C | | | UV-VIS-NIR Spectrometer Cary 5000 | Agilent (Varian) | 180 - 3000 nm | transmittance and reflectance, specular and diffus | reflectance measurements with traceable standards (specular and diffus). Simultaneous modelling of absolute data and ellipsometric data. Wavelength range for diffuse measurements 250 - 2500 nm. | | | FT-IR Spectrometer Equinox 55 | Bruker | 2500 - 50000 nm | transmittance and reflectance, specular and diffus | reflectance measurements with traceable standards (specular and diffus). Simultaneous modelling of absolute data and ellipsometric data. Wavelength range for diffuse measurements 2500 - 16700 nm | | | | | top | |
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