Uni-Leipzig
WGE_LOGO

Welcome to Database Ellipsometry

Member of:
AKE_LOGO
ALD-group of Dr. Matthias Albert (Institute of Semiconductors and Microsystems , Dresden)
Head: Marcel Junige (E-Mail: marcel.junige 'at' mailbox.tu-dresden.de)
members:
Topics: in situ, real-time, spectroscopic ellipsometry, atomic layer deposition