RC2-DI (J.A. Woollam Co., Inc)
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Spectroscopic Mueller-matrix ellipsometer,
dual-rotating-compensator-type
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Parameter/Options:
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- Spectral range:
193 nm - 1700 nm / 0.7 eV - 6.4 eV
- Standard ellipsometry
- Generalized ellipsometry
- (Full) 4x4 Mueller matrix ellipsometry
- Depolarization, reflection and transmission
- Focussing probes (spot diameter 300 µm)
- Automated angle stage
- Scanning option (rotation and translation stage)
- In-situ application
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M88 (J.A. Woollam Co., Inc)
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Spectroscopic ellipsometer,
rotating-analyzer-type
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Parameter/Options:
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- Spectral range:
283 nm - 760 nm / 1.6 eV - 4.4 eV
- Standard ellipsometry
- Manual angle stage
- In-situ application
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