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Ion beam sputtering
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101.
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T. Rüdiger, M. Mitzschke, C. Bundesmann, A. Prager,
Y. Liu, B. Abel, A. Schulze, F. Frost,
Ion incidence angle-dependent pattern formation on AZ(R) 4562
photoresist by reactive ion beam erosion
Surf. Coat. Technol. 494 (2024) 131407.
 DOI: 10.1016/j.surfcoat.2024.131407
 Open Access
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100.
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D. Kalanov, J.W. Gerlach, C. Bundesmann, J. Bauer, A. Lotnyk,
H. v. Wenckstern, A. Anders, Y. Unutulmazsoy,
Heteroepitaxial growth of Ga2O3 thin films on Al2O3(0001)
by ion beam sputter deposition
J. Apll. Phys. 136 (2024) 015302.
DOI: 10.1063/5.0211179
Open Access
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99.
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C. Bundesmann,
Insights into Ion Beam Sputter Deposition
Technical Paper (Invited), International Conference on Coatings on Glass and Plastics, Dresden, Germany, June 24-26, 2024.
Preprint available at ResearchGate:
https://www.researchgate.net/publication/383952929
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98.
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S. Henn, G. Dornberg, A. Müller, C. Bundesmann, F. Frost, C. Sturm, M. Grundmann,
Optical and structural characterization of ZnO thin films upon ion beam assisted smoothing
Thin Solid Films 794 (2024) 140290.
DOI: 10.1016/j.tsf.2024.140290
Open Access
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97.
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F. Linß, C. Bundesmann, F. Frost,
Low-energy ion beam erosion of Si with simultaneous co-deposition of metallic surfactants:
experimental and simulated data
Appl. Surf. Sci. 646 (2024) 158293.
DOI: 10.1016/j.apsusc.2023.158923
Open Access
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94.
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Editor's Pick
D. Kalanov, Y. Unutulmazsoy, D. Spemann, J. Bauer, A. Anders, C. Bundesmann
Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature
J. Vac. Sci. Technol. A 40 (2022) 033409.
DOI: 10.1116/6.0001825
Preprint available at ResearchGate:
https://www.researchgate.net/publication/360304833
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92.
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J. Bernstein, A. Finzel, J. W. Gerlach, C. Bundesmann
Ion beam sputter deposition of SiO2 thin films using oxygen ions
Eur. Phys. J. B 95 (2022) 39.
DOI: 10.1140/epjb/s10051-022-00307-y
Preprint available at ResearchGate:
https://www.researchgate.net/publication/359022670
Springer Nature | SN SharedIt
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90.
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D. Kalanov, A. Anders, C. Bundesmann
Properties of secondary ions in ion beam sputtering of Ga2O3
J. Vac. Sci. Technol. A 39 (2021) 053409.
DOI: 10.1116/6.0001204
Preprint available at ResearchGate:
https://www.researchgate.net/publication/350286715
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89.
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L. Botsch, C. Bundesmann, D. Spemann, P. Esquinazi
Toward a systematic discovery of artificial functional magnetic materials
Phys. Rev. B 104 (2021) 014428.
DOI: 10.1103/PhysRevB.104.014428
Preprint available at ResearchGate:
https://www.researchgate.net/publication/350286715
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88.
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C. Bundesmann, J. Bauer, A. Finzel, J. W. Gerlach, W. Knolle, A. Hellmich, R. Synowicki
Properties of indium tin oxide thin films grown by Ar ion beam sputter deposition
J. Vac. Sci. Technol. A 39 (2021) 033406.
DOI: 10.1116/6.0000917
Preprint available at ResearchGate:
https://www.researchgate.net/publication/350286715
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85.
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C. Bundesmann, A. Hellmich
Energy distributions of secondary ions for the Ar ion beam sputtering of indium tin oxide
J. Vac. Sci. Technol. B 38 (2020) 064002.
DOI: 10.1116/6.0000516
Preprint available at ResearchGate:
https://www.researchgate.net/publication/344449529
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84.
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K. Oh, D. Kalanov, A. Anders, C. Bundesmann
Properties of secondary particles for ion beam sputtering of silicon using low-energy oxygen ions
J. Vac. Sci. Technol. A 38 (2020) 033011.
DOI: 10.1116/6.0000037
Preprint available at ResearchGate:
https://www.researchgate.net/publication/340882929
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83.
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T. Amelal, L. Pietzonka, E. Rohkamm C. Bundesmann
Properties of secondary particles for the reactive ion beam sputtering of Ti and TiO2 using oxygen ions
J. Vac. Sci. Technol. A 38 (2020) 033403.
DOI: 10.1116/1.5142911
Preprint available at ResearchGate:
https://www.researchgate.net/publication/340136990
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82.
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M. Stiller, A. T. N'Diaye, H. Ohldag, J. Barzola-Quiquia,
P. D. Esquinazi, T. Amelal, C. Bundesmann, D. Spemann, M. Trautmann,
A. Chassé, H. Ben Hamed, W. A. Adeagbo, W. Hergert
Titanium 3d-ferromagnetism with perpendicular anisotropy in defective anatase
Phys. Rev. B 101 (2020) 014412.
DOI: 10.1103/PhysRevB.101.014412
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79.
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Invited Contribution
C. Bundesmann
Schichtabscheidung mittels Ionenstrahlzerstäuben -
Grundlagen und Anwendungsbeispiele für die Erzeugung dünner Schichten
mit maßgeschneiderten Eigenschaften
Vakuum in Forschung und Praxis 31 (5) (2019) 25-31.
DOI: 10.1002/vipr.201900724
Preprint available at ResearchGate:
https://www.researchgate.net/publication/336205758
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76.
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D. Kalanov, A. Anders, C. Bundesmann
Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions
J. Vac. Sci. Technol. A 37 (2019) 051507.
DOI: 10.1116/1.5114973
Preprint available at ResearchGate: https://www.researchgate.net/publication/335371597
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74.
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Invited Contribution
C. Bundesmann, R. Feder, T. Amelal, D. Spemann, H. Neumann
Das Ionenstrahlzerstäuben - Ein bewährtes Abscheideverfahren aus anderen (Streu)Winkeln betrachtet
Galvanotechnik 110 (2019) 1338-1344.
More: https://www.leuze-verlag.de/...
Preprint available at ResearchGate:
https://www.researchgate.net/publication/336798526
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73.
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C. Bundesmann, T. Amelal
Secondary particle properties for the ion beam sputtering of TiO2 in a reactive oxygen atmosphere
Appl. Surf. Sci. 485 (2019) 391-401.
DOI: 10.1016/j.apsusc.2019.04.078
Preprint available at ResearchGate:
https://www.researchgate.net/publication/332518253
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72.
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Invited Contribution
C. Bundesmann
Schichten mit maßgeschneiderten Eigenschaften
J. Oberfl. Techn. 59 (4) (2019) 46-49.
DOI: 10.1007/s35144-019-0061-1
Preprint available at ResearchGate:
https://www.researchgate.net/publication/332059077
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71.
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C. Bundesmann, R. Feder, T. Lautenschläger, L. Pietzonka, D. Spemann
Tailoring Thin Film Properties by Ion Beam Sputter Deposition
Tagungsband 14. Thementage Grenz- und Oberflächentechnik (ThGOT) und
6. Kolloquium Dünne Schichten in der Optik, Zeulenroda, 2019.
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70.
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Invited Tutorial & Featured Article
C. Bundesmann, H. Neumann
Tutorial: The Systematics of Ion Beam Sputtering
for Deposition of Thin Films with Tailored Properties
J. Appl. Phys. 124 (2018) 231102.
DOI: 10.1063/1.5054046
Preprint available at ResearchGate:
https://www.researchgate.net/publication/329845803
Scilight
C. Patrick, Ion beam sputter deposition allows tailoring of thin film properties, AIP Publishing, 2018.
DOI: 10.1063/1.5086197
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69.
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L. Pietzonka, T. Lautenschläger, D. Spemann, A. Finzel,
J.W. Gerlach, F. Frost, C. Bundesmann
Ion beam sputter deposition of TiO2 films using oxygen ions
Eur. Phys. J. B 91 (2018) 252.
DOI: 10.1140/epjb/e2018-90293-3
Preprint available at ResearchGate:
https://www.researchgate.net/publication/328398655
Springer Nature | SN SharedIt
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68.
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M. Mateev, T. Lautenschläger, D. Spemann, A. Finzel,
J.W. Gerlach, F. Frost, C. Bundesmann
Systematic investigation of the reactive ion beam sputter deposition
process of SiO2
Eur. Phys. J. B 91 (2018) 45.
DOI: 10.1140/epjb/e2018-80453-x
Preprint available at ResearchGate:
https://www.researchgate.net/publication/323448403
Springer Nature | SN SharedIt
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67.
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C. Bundesmann, T. Lautenschläger, D. Spemann, A. Finzel,
M. Mensing, F. Frost
Correlation of process parameters and properties of TiO2 films grown by ion beam sputter deposition from a ceramic target
Eur. Phys. J. B 90 (2017) 187.
DOI: 10.1140/epjb/e2017-80326-x
Preprint available at ResearchGate:
https://www.researchgate.net/publication/320348565
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63.
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C. Bundesmann, R. Feder, T. Lautenschläger, M. Mateev, D. Spemann,
Sytematics in Ion Beam Sputter Deposition
Proceedings 23rd International Conference on Ion-Surface Interactions (ISI-2017),
Moscow, 2017.
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62.
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C. Bundesmann, T. Lautenschläger, D. Spemann, A. Finzel,
E. Thelander, M. Mensing, F. Frost
Systematic investigation of the properties of TiO2 films grown by reactive ion beam sputter deposition
Appl. Surf. Sci. 421 (2017) 331-340.
DOI: 10.1016/j.apsusc.2016.08.056
Preprint available at ResearchGate:
https://www.researchgate.net/publication/306104345
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61.
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T. Lautenschläger, C. Bundesmann
Reactive ion beam sputtering of Ti: Influence of process parameters
on angular and energy distribution of sputtered and backscattered particles
J. Vac. Sci. Technol. A 35 (2017) 041001.
DOI: 10.1116/1.4985050
Preprint available at ResearchGate:
https://www.researchgate.net/publication/317395198
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57.
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C. Bundesmann, R. Feder, T. Lautenschläger, D. Spemann
Ionenstrahlgestützte Schichtabscheidung: Zusammenhänge zwischen Prozessparametern, Teilchen- und Schichteigenschaften
Tagungsband 12. Thementage Grenz- und Oberflächentechnik (ThGOT) und
5. Kolloquium Dünne Schichten in der Optik, Zeulenroda, 2017.
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56.
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C. Bundesmann, T. Lautenschläger, E. Thelander, D. Spemann
Reactive Ar ion beam sputter deposition of TiO2 films: Influence of process parameters on film properties
Nucl. Instrum. Methods Phys. Res. B 395 (2017) 17-23.
DOI: 10.1016/j.nimb.2017.01.078
Preprint available at ResearchGate:
https://www.researchgate.net/publication/313477457
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54.
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T. Lautenschläger, R. Feder, H. Neumann, C. Rice, M. Schubert, C. Bundesmann
Ion beam sputtering of Ti: Influence of process parameters
on angular and energy distribution of sputtered and backscattered particles
Nucl. Instrum. Methods Phys. Res. B 385 (2016) 30-39.
DOI: 10.1016/j.nimb.2016.08.017
Preprint available at ResearchGate:
https://www.researchgate.net/publication/308017905
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49.
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Invited Contribution
C. Bundesmann, R. Feder, T. Lautenschläger, H. Neumann
Energy distribution of secondary particles
in the ion beam sputter deposition process of Ag:
Experiment, Calculation and Simulation
Contrib. Plasma Phys. 55 (2015) 737-746.
DOI: 10.1002/ctpp.201510015
Preprint available at ResearchGate:
https://www.researchgate.net/publication/287977901
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46.
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C. Bundesmann, R. Feder, R. Wunderlich, U. Teschner,
M. Grundmann, H. Neumann
Ion beam sputter deposition of Ge films:
Influence of process parameters on film properties
Thin Solid Films 589 (2015) 487-492.
DOI: 10.1016/j.tsf.2015.06.017
Preprint available at ResearchGate:
https://www.researchgate.net/publication/282489930
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44.
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C. Bundesmann, R. Feder, H. Neumann
Optimierung der Eigenschaften dünner Schichten durch Abscheidung mit Ionenstrahlzerstäuben
Tagungsband 10. Thementage Grenz- und Oberflächtechnik (ThGOT) und
4. Kolloquium Dünne Schichten in der Optik, Leipzig, 2014.
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42.
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R. Feder, C. Bundesmann, H. Neumann, B. Rauschenbach
Ion beam sputtering of germanium - Energy and angular distribution of sputtered and scattered particles
Nucl. Instrum. Methods Phys. Res. B 334 (2014) 88-95.
DOI: 10.1016/j.nimb.2014.05.009
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41.
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C. Bundesmann, R. Feder, J.W. Gerlach, H. Neumann
Ion beam sputter deposition of Ag films:
Influence of process parameters on electrical and optical properties, average grain sizes
Thin Solid Films 551 (2014) 46-52.
DOI: 10.1016/j.tsf.2013.11.097
|
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40.
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R. Feder, F. Frost, H. Neumann, C. Bundesmann,
B. Rauschenbach
Systematic investigations of low energy Ar ion beam sputtering of Si and Ag
Nucl. Instrum. Methods Phys. Res. B 317A (2013) 137-142.
DOI: 10.1016/j.nimb.2013.01.056
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38.
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R. Feder, C. Bundesmann, H. Neumann, B. Rauschenbach
Ion Beam Sputtering of Ag - Angular and Energetic Distributions of Sputtered and Scattered Particles
Nucl. Instrum. Methods Phys. Res. B 316 (2013) 198-204.
DOI: 10.1016/j.nimb.2013.09.007
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36.
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H. Neumann, R. Feder, C. Bundesmann
Thruster Relevant Material Sputter Investigations
Electronic Journal of the Moscow Aviation Institute "Труды МАИ", Vol. 60 (2012) 11.
Link: http://trudymai.ru/eng/
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33.
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M. Tartz, T. Heyn, C. Bundesmann, C.G. Zimmermann, H. Neumann
Sputter yields of Mo, Ti, W, Al, Ag under Xenon ion incidence
Eur. Phys. J. D 61 (2011) 587-592.
DOI: 10.1140/epjd/e2010-10553-8
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29.
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M. Tartz, T. Heyn, C. Bundesmann, H. Neumann
Measuring sputter yields of ceramic materials
Proceedings 31st International Electric Propulsion Conference, Ann Arbor, USA, 2009, Paper IEPC-2009-240.
Link: http://erps.spacegrant.org
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28.
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C. Bundesmann, I.−M. Eichentopf, S. Mändl, H. Neumann
Stress relaxation and optical characterization of TiO2 and SiO2 films grown by
dual ion beam deposition
Thin Solid Films 516 (2008) 8604-8608.
DOI: 10.1016/j.tsf.2008.06.032
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